Please use this identifier to cite or link to this item: http://hdl.handle.net/10525/152

 Title: Modeling Optical Response of Thin Films: Choice of the Refractive Index Dispersion Law Authors: Sharlandjiev, PeterStoilov, Georgi Keywords: Thin filmsMaterials and process characterization Issue Date: 2008 Publisher: Institute of Information Theories and Applications FOI ITHEA Abstract: Determination of the so-called optical constants (complex refractive index N, which is usually a function of the wavelength, and physical thickness D) of thin films from experimental data is a typical inverse non-linear problem. It is still a challenge to the scientific community because of the complexity of the problem and its basic and technological significance in optics. Usually, solutions are looked for models with 3-10 parameters. Best estimates of these parameters are obtained by minimization procedures. Herein, we discuss the choice of orthogonal polynomials for the dispersion law of the thin film refractive index. We show the advantage of their use, compared to the Selmeier, Lorentz or Cauchy models. URI: http://hdl.handle.net/10525/152 ISSN: 1313-048X Appears in Collections: Volume 2 Number 2

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