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Please use this identifier to cite or link to this item: http://hdl.handle.net/10525/152

Title: Modeling Optical Response of Thin Films: Choice of the Refractive Index Dispersion Law
Authors: Sharlandjiev, Peter
Stoilov, Georgi
Keywords: Thin films
Materials and process characterization
Issue Date: 2008
Publisher: Institute of Information Theories and Applications FOI ITHEA
Abstract: Determination of the so-called optical constants (complex refractive index N, which is usually a function of the wavelength, and physical thickness D) of thin films from experimental data is a typical inverse non-linear problem. It is still a challenge to the scientific community because of the complexity of the problem and its basic and technological significance in optics. Usually, solutions are looked for models with 3-10 parameters. Best estimates of these parameters are obtained by minimization procedures. Herein, we discuss the choice of orthogonal polynomials for the dispersion law of the thin film refractive index. We show the advantage of their use, compared to the Selmeier, Lorentz or Cauchy models.
URI: http://hdl.handle.net/10525/152
ISSN: 1313-048X
Appears in Collections:Volume 2 Number 2

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